CasaXPS Manual

Technical guides, feature overviews, and in-depth manuals for mastering X-ray Photoelectron Spectroscopy data analysis.

Introduction to CasaXPS

Review of CasaXPS Features

CasaXPS Features

PDF which includes table of Component-Constraints Keywords

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Components Property Page

Components Property Page

PDF detailing features aimed at constructing peak models

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Components Property Page

Quantification of Narrow Scan Spectra

PDF discussing features used to quantify spectra including energy calibration

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Components Property Page

Peak Models and Fitting Statistics

PDF review of peak models, bell-shaped curves and background curves

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CasaXPS Cookbook2026 Cover
Free Resource

CasaXPS Cookbook2026

XPS Data Analysis

This ebook is a review of XPS data treatments available in CasaXPS.

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Roscoff 2019 Cookbook Cover
Free Resource

Roscoff 2019 Cookbook

XPS Data Analysis: a companion text to videos and data

This ebook is the companion text to videos and data that was used at a workshop in France known as Roscoff 2019 Workshop.

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CasaXPS Tutorials

The following tutorials are in the format: video, data and pdf.
The video shows how the data is used in CasaXPS. The data is provided so you can try the techniques seen in the video. The PDF is provided to explain the video in-depth.

Quantification by XPS Explained by Example (Fused Silica)

Constructing a Peak Model: N 1s Narrow Scan Data Fitting using Four Component Peaks

Constructing Line Shapes: Test Peak Model

Processing a Sputter Depth Profile: Thick layer of SiO2 on Si and an example of estimating thin film depth